Atomic Layer Deposition of Silicon Nitride Thin Films: A...

Materials 2016 / 12 Vol. 9; Iss. 12

Atomic Layer Deposition of Silicon Nitride Thin Films: A Review of Recent Progress, Challenges, and Outlooks

Meng, Xin, Byun, Young-Chul, Kim, Harrison, Lee, Joy, Lucero, Antonio, Cheng, Lanxia, Kim, Jiyoung
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Volume:
9
Language:
english
Journal:
Materials
DOI:
10.3390/ma9121007
Date:
December, 2016
File:
PDF, 2.20 MB
english, 2016
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