Micromanufacturing in Fused Silica via Femtosecond Laser...

Micromanufacturing in Fused Silica via Femtosecond Laser Irradiation Followed by Gas-Phase Chemical Etching

Venturini, Francesco, Sansotera, Maurizio, Vazquez, Rebeca Martinez, Osellame, Roberto, Cerullo, Giulio, Navarrini, Walter
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Volume:
3
Language:
english
Journal:
Micromachines
DOI:
10.3390/mi3040604
Date:
September, 2012
File:
PDF, 616 KB
english, 2012
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