Effects of Micromachining Processes on Electro-Osmotic Flow Mobility of Glass Surfaces
Koga, Yosuke, Kuriyama, Reiko, Sato, Yohei, Hishida, Koichi, Miki, NorihisaVolume:
4
Language:
english
Journal:
Micromachines
DOI:
10.3390/mi4010067
Date:
March, 2013
File:
PDF, 497 KB
english, 2013