Optimized SU-8 Processing for Low-Cost Microstructures...

Micromachines 2014 / 09 Vol. 5; Iss. 3

Optimized SU-8 Processing for Low-Cost Microstructures Fabrication without Cleanroom Facilities

Pinto, Vânia, Sousa, Paulo, Cardoso, Vanessa, Minas, Graça
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Volume:
5
Language:
english
Journal:
Micromachines
DOI:
10.3390/mi5030738
Date:
September, 2014
File:
PDF, 4.60 MB
english, 2014
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