SU-8 Photolithography as a Toolbox for Carbon MEMS

SU-8 Photolithography as a Toolbox for Carbon MEMS

Martinez-Duarte, Rodrigo
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Volume:
5
Language:
english
Journal:
Micromachines
DOI:
10.3390/mi5030766
Date:
September, 2014
File:
PDF, 2.01 MB
english, 2014
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