![](/img/cover-not-exists.png)
SU-8 Photolithography as a Toolbox for Carbon MEMS
Martinez-Duarte, RodrigoVolume:
5
Language:
english
Journal:
Micromachines
DOI:
10.3390/mi5030766
Date:
September, 2014
File:
PDF, 2.01 MB
english, 2014