Dynamic Wet Etching of Silicon through Isopropanol Alcohol...

Micromachines 2015 / 10 Vol. 6; Iss. 10

Dynamic Wet Etching of Silicon through Isopropanol Alcohol Evaporation

Monteiro, Tiago, Kastytis, Pamakštys, Gonçalves, Luís, Minas, Graça, Cardoso, Susana
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Volume:
6
Language:
english
Journal:
Micromachines
DOI:
10.3390/mi6101437
Date:
October, 2015
File:
PDF, 11.93 MB
english, 2015
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