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Two-Layer Microstructures Fabricated by One-Step Anisotropic Wet Etching of Si in KOH Solution
Lu, Han, Zhang, Hua, Jin, Mingliang, He, Tao, Zhou, Guofu, Shui, LinglingVolume:
7
Language:
english
Journal:
Micromachines
DOI:
10.3390/mi7020019
Date:
January, 2016
File:
PDF, 4.93 MB
english, 2016