Fabrication of Vacuum-Sealed Capacitive Micromachined Ultrasonic Transducer Arrays Using Glass Reflow Process
Toan, Nguyen, Hahng, Shim, Song, Yunheub, Ono, TakahitoVolume:
7
Language:
english
Journal:
Micromachines
DOI:
10.3390/mi7050076
Date:
April, 2016
File:
PDF, 2.16 MB
english, 2016