A Resonant Piezoelectric Diaphragm Pump Transferring Gas...

Micromachines 2016 / 12 Vol. 7; Iss. 12

A Resonant Piezoelectric Diaphragm Pump Transferring Gas with Compact Structure

Wang, Jiantao, Liu, Yong, Shen, Yanhu, Chen, Song, Yang, Zhigang
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Volume:
7
Language:
english
Journal:
Micromachines
DOI:
10.3390/mi7120219
Date:
December, 2016
File:
PDF, 2.15 MB
english, 2016
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