Non-Lithographic Silicon Micromachining Using Inkjet and...

Micromachines 2016 / 12 Vol. 7; Iss. 12

Non-Lithographic Silicon Micromachining Using Inkjet and Chemical Etching

Hoshian, Sasha, Gaspar, Cristina, Vasara, Teemu, Jahangiri, Farzin, Jokinen, Ville, Franssila, Sami
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Volume:
7
Language:
english
Journal:
Micromachines
DOI:
10.3390/mi7120222
Date:
December, 2016
File:
PDF, 5.09 MB
english, 2016
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