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The High Q Factor Lateral Field–Excited Thickness Shear Mode Film Bulk Acoustic Resonator Working in Liquid
Chen, Da, Ren, Wenwen, Song, Shuren, Wang, Jingjing, Liu, Weihui, Wang, PengVolume:
7
Language:
english
Journal:
Micromachines
DOI:
10.3390/mi7120231
Date:
December, 2016
File:
PDF, 6.11 MB
english, 2016