A Sensitivity-Enhanced Film Bulk Acoustic Resonator Gas...

Micromachines 2017 / 01 Vol. 8; Iss. 1

A Sensitivity-Enhanced Film Bulk Acoustic Resonator Gas Sensor with an Oscillator Circuit and Its Detection Application

Zhang, Mengying, Du, Lidong, Fang, Zhen, Zhao, Zhan
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Volume:
8
Language:
english
Journal:
Micromachines
DOI:
10.3390/mi8010025
Date:
January, 2017
File:
PDF, 4.03 MB
english, 2017
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