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RF Sputtering, Post-Annealing Treatment and Characterizations of ZnO (002) Thin Films on 3C-SiC (111)/Si (111) Substrates
Valliyil Sasi, Visakh, Iqbal, Abid, Chaik, Kien, Iacopi, Alan, Mohd-Yasin, FaisalVolume:
8
Language:
english
Journal:
Micromachines
DOI:
10.3390/mi8050148
Date:
May, 2017
File:
PDF, 2.53 MB
english, 2017