A Simple Extraction Method of Young’s Modulus for Multilayer Films in MEMS Applications
Guo, Xin-Ge, Zhou, Zai-Fa, Sun, Chao, Li, Wei-Hua, Huang, Qing-AnVolume:
8
Language:
english
Journal:
Micromachines
DOI:
10.3390/mi8070201
Date:
June, 2017
File:
PDF, 1.40 MB
english, 2017