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Operation of a MOEMS Deformable Mirror in Cryo: Challenges and Results
Zamkotsian, Frederic, Lanzoni, Patrick, Barette, Rudy, Helmbrecht, Michael, Marchis, Franck, Teichman, AlexVolume:
8
Language:
english
Journal:
Micromachines
DOI:
10.3390/mi8080233
Date:
July, 2017
File:
PDF, 11.61 MB
english, 2017