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Coupling Mechanism Analysis and Fabrication of Triaxial Gyroscopes in Monolithic MIMU
Xia, Dunzhu, Xu, LeiVolume:
8
Language:
english
Journal:
Micromachines
DOI:
10.3390/mi8100310
Date:
October, 2017
File:
PDF, 12.10 MB
english, 2017