Design and Fabrication of Capacitive Silicon Nanomechanical Resonators with Selective Vibration of a High-Order Mode
Toan, Nguyen, Shimazaki, Tsuyoshi, Inomata, Naoki, Song, Yunheub, Ono, TakahitoVolume:
8
Language:
english
Journal:
Micromachines
DOI:
10.3390/mi8100312
Date:
October, 2017
File:
PDF, 3.71 MB
english, 2017