Investigation on the Quality Factor Limit of the (111)...

Micromachines 2018 / 01 Vol. 9; Iss. 1

Investigation on the Quality Factor Limit of the (111) Silicon Based Disk Resonator

Zhou, Xin, Xiao, Dingbang, Li, Qingsong, Hu, Qian, Hou, Zhanqiang, He, Kaixuan, Chen, Zhihua, Zhao, Chun, Wu, Yulie, Wu, Xuezhong, Seshia, Ashwin
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Volume:
9
Language:
english
Journal:
Micromachines
DOI:
10.3390/mi9010025
Date:
January, 2018
File:
PDF, 4.77 MB
english, 2018
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