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Design and Simulation of A Novel Piezoelectric AlN-Si Cantilever Gyroscope
Yang, Jian, Si, Chaowei, Yang, Fan, Han, Guowei, Ning, Jin, Yang, Fuhua, Wang, XiaodongVolume:
9
Language:
english
Journal:
Micromachines
DOI:
10.3390/mi9020081
Date:
February, 2018
File:
PDF, 1.66 MB
english, 2018