Integrated Electromechanical Transduction Schemes for...

Micromachines 2018 / 04 Vol. 9; Iss. 5

Integrated Electromechanical Transduction Schemes for Polymer MEMS Sensors

Thuau, Damien, Ducrot, Pierre-Henri, Poulin, Philippe, Dufour, Isabelle, Ayela, Cédric
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Volume:
9
Language:
english
Journal:
Micromachines
DOI:
10.3390/mi9050197
Date:
April, 2018
File:
PDF, 2.23 MB
english, 2018
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