FR4-Based Electromagnetic Scanning Micromirror Integrated...

Micromachines 2018 / 05 Vol. 9; Iss. 5

FR4-Based Electromagnetic Scanning Micromirror Integrated with Angle Sensor

Lei, Hongjie, Wen, Quan, Yu, Fan, Zhou, Ying, Wen, Zhiyu
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Volume:
9
Language:
english
Journal:
Micromachines
DOI:
10.3390/mi9050214
Date:
May, 2018
File:
PDF, 12.73 MB
english, 2018
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