Oxygen Partial Pressure Impact on Characteristics of Indium Titanium Zinc Oxide Thin Film Transistor Fabricated via RF Sputtering
Hsu, Ming-Hung, Chang, Sheng-Po, Chang, Shoou-Jinn, Wu, Wei-Ting, Li, Jyun-YiVolume:
7
Language:
english
Journal:
Nanomaterials
DOI:
10.3390/nano7070156
Date:
June, 2017
File:
PDF, 2.13 MB
english, 2017