Hermetic Cavities Using Gold Wafer Level Thermocompression...

Hermetic Cavities Using Gold Wafer Level Thermocompression Bonding

Charlot, Samuel, Pons, Patrick, Dilhan, Monique, Vallet, Isabelle, Brida, Sebastiano
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Volume:
1
Language:
english
Journal:
Proceedings
DOI:
10.3390/proceedings1040607
Date:
August, 2017
File:
PDF, 1.02 MB
english, 2017
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