Effect of non-strained capping layer on excess stress in...

Effect of non-strained capping layer on excess stress in strained layers

Zhi Jin, Shuren Yang, Chunsheng Ma, Haiyan An, Benzhong Wang, Shiyong Liu
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Volume:
42
Language:
english
Pages:
5
DOI:
10.1007/bf02882248
Date:
May, 1999
File:
PDF, 339 KB
english, 1999
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