Microfabrication and Integration of a Sol-Gel PZT Folded...

Microfabrication and Integration of a Sol-Gel PZT Folded Spring Energy Harvester

Lueke, Jonathan, Badr, Ahmed, Lou, Edmond, Moussa, Walied
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Volume:
15
Language:
english
Journal:
Sensors
DOI:
10.3390/s150612218
Date:
May, 2015
File:
PDF, 4.01 MB
english, 2015
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