Fabrication and Characterization of a CMOS-MEMS Humidity...

Fabrication and Characterization of a CMOS-MEMS Humidity Sensor

Dennis, John-Ojur, Ahmed, Abdelaziz-Yousif, Khir, Mohd-Haris
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Volume:
15
Language:
english
Journal:
Sensors
DOI:
10.3390/s150716674
Date:
July, 2015
File:
PDF, 602 KB
english, 2015
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