Low-Actuation Voltage MEMS Digital-to-Analog Converter with...

Sensors 2015 / 08 Vol. 15; Iss. 9

Low-Actuation Voltage MEMS Digital-to-Analog Converter with Parylene Spring Structures

Ma, Cheng-Wen, Lee, Fu-Wei, Liao, Hsin-Hung, Kuo, Wen-Cheng, Yang, Yao-Joe
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
15
Language:
english
Journal:
Sensors
DOI:
10.3390/s150921567
Date:
August, 2015
File:
PDF, 3.23 MB
english, 2015
Conversion to is in progress
Conversion to is failed