Topologically Optimized Nano-Positioning Stage Integrating...

Sensors 2017 / 01 Vol. 17; Iss. 2

Topologically Optimized Nano-Positioning Stage Integrating with a Capacitive Comb Sensor

Chen, Tao, Wang, Yaqiong, Liu, Huicong, Yang, Zhan, Wang, Pengbo, Sun, Lining
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Volume:
17
Language:
english
Journal:
Sensors
DOI:
10.3390/s17020257
Date:
January, 2017
File:
PDF, 6.94 MB
english, 2017
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