Testing of Piezo-Actuated Glass Micro-Membranes by Optical...

Sensors 2017 / 02 Vol. 17; Iss. 3

Testing of Piezo-Actuated Glass Micro-Membranes by Optical Low-Coherence Reflectometry

Merlo, Sabina, Poma, Paolo, Crisà, Eleonora, Faralli, Dino, Soldo, Marco
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Volume:
17
Language:
english
Journal:
Sensors
DOI:
10.3390/s17030462
Date:
February, 2017
File:
PDF, 2.69 MB
english, 2017
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