Highly Sensitive Sputtered ZnO:Ga Thin Films Integrated by...

Sensors 2017 / 05 Vol. 17; Iss. 5

Highly Sensitive Sputtered ZnO:Ga Thin Films Integrated by a Simple Stencil Mask Process on Microsensor Platforms for Sub-ppm Acetaldehyde Detection

Presmanes, Lionel, Thimont, Yohann, Chapelle, Audrey, Blanc, Frédéric, Talhi, Chabane, Bonningue, Corine, Barnabé, Antoine, Menini, Philippe, Tailhades, Philippe
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Volume:
17
Language:
english
Journal:
Sensors
DOI:
10.3390/s17051055
Date:
May, 2017
File:
PDF, 4.12 MB
english, 2017
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