Nitride-Based Materials for Flexible MEMS Tactile and Flow...

Sensors 2017 / 05 Vol. 17; Iss. 5

Nitride-Based Materials for Flexible MEMS Tactile and Flow Sensors in Robotics

Abels, Claudio, Mastronardi, Vincenzo, Guido, Francesco, Dattoma, Tommaso, Qualtieri, Antonio, Megill, William, De Vittorio, Massimo, Rizzi, Francesco
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Volume:
17
Language:
english
Journal:
Sensors
DOI:
10.3390/s17051080
Date:
May, 2017
File:
PDF, 5.40 MB
english, 2017
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