Nonlinear Parameter Identification of a Resonant...

Sensors 2017 / 05 Vol. 17; Iss. 5

Nonlinear Parameter Identification of a Resonant Electrostatic MEMS Actuator

Al-Ghamdi, Majed, Alneamy, Ayman, Park, Sangtak, Li, Beichen, Khater, Mahmoud, Abdel-Rahman, Eihab, Heppler, Glenn, Yavuz, Mustafa
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Volume:
17
Language:
english
Journal:
Sensors
DOI:
10.3390/s17051121
Date:
May, 2017
File:
PDF, 1.78 MB
english, 2017
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