![](/img/cover-not-exists.png)
Novel Gas Sensor Arrays Based on High-Q SAM-Modified Piezotransduced Single-Crystal Silicon Bulk Acoustic Resonators
Zhao, Yuan, Yang, Qingrui, Chang, Ye, Pang, Wei, Zhang, Hao, Duan, XuexinVolume:
17
Language:
english
Journal:
Sensors
DOI:
10.3390/s17071507
Date:
June, 2017
File:
PDF, 4.45 MB
english, 2017