A 4 mm2 Double Differential Torsional MEMS Accelerometer...

Sensors 2017 / 10 Vol. 17; Iss. 10

A 4 mm2 Double Differential Torsional MEMS Accelerometer Based on a Double-Beam Configuration

Miao, Tongqiao, Xiao, Dingbang, Li, Qingsong, Hou, Zhanqiang, Wu, Xuezhong
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Volume:
17
Language:
english
Journal:
Sensors
DOI:
10.3390/s17102264
Date:
October, 2017
File:
PDF, 6.41 MB
english, 2017
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