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Analysis of the Sensing Properties of a Highly Stable and Reproducible Ozone Gas Sensor Based on Amorphous In-Ga-Zn-O Thin Film
Wu, Chiu-Hsien, Jiang, Guo-Jhen, Chang, Kai-Wei, Deng, Zu-Yin, Li, Yu-Ning, Chen, Kuen-Lin, Jeng, Chien-ChungVolume:
18
Language:
english
Journal:
Sensors
DOI:
10.3390/s18010163
Date:
January, 2018
File:
PDF, 1.84 MB
english, 2018