PSPICE Hybrid Modeling and Simulation of Capacitive Micro-Gyroscopes
Su, Yan, Tong, Xin, Liu, Nan, Han, Guowei, Si, Chaowei, Ning, Jin, Li, Zhaofeng, Yang, FuhuaVolume:
18
Language:
english
Journal:
Sensors
DOI:
10.3390/s18041006
Date:
March, 2018
File:
PDF, 16.58 MB
english, 2018