Six Degrees of Freedom Displacement Measurement System for...

Sensors 2018 / 06 Vol. 18; Iss. 7

Six Degrees of Freedom Displacement Measurement System for Wafer Stage Composed of Hall Sensors

Zhao, Bo, Shi, Weijia, Zhang, Jiawei, Zhang, Ming, Qi, Xue, Li, Jiaxin, Li, Feng, Tan, Jiubin
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Volume:
18
Language:
english
Journal:
Sensors
DOI:
10.3390/s18072030
Date:
June, 2018
File:
PDF, 7.76 MB
english, 2018
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