Three Cavity Tunable MEMS Fabry Perot Interferometer
Parashar, Avinash, Shah, Ankur, Packirisamy, Muthukumaran, Sivakumar, NarayanswamyVolume:
7
Language:
english
Journal:
Sensors
DOI:
10.3390/s7123071
Date:
December, 2007
File:
PDF, 362 KB
english, 2007