SU-8 Cantilevers for Bio/chemical Sensing; Fabrication,...

Sensors 2008 / 03 Vol. 8; Iss. 3

SU-8 Cantilevers for Bio/chemical Sensing; Fabrication, Characterisation and Development of Novel Read-out Methods

Nordström, Maria, Keller, Stephan, Lillemose, Michael, Johansson, Alicia, Dohn, Søren, Haefliger, Daniel, Blagoi, Gabriela, Havsteen-Jakobsen, Mogens, Boisen, Anja
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Volume:
8
Language:
english
Journal:
Sensors
DOI:
10.3390/s8031595
Date:
March, 2008
File:
PDF, 659 KB
english, 2008
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