Non-destructive and non-contact measurement of semiconductor optical waveguide using optical coherence tomography with a visible broadband light source
Ishida, Kazumasa, Ozaki, Nobuhiko, Ohsato, Hirotaka, Watanabe, Eiichiro, Ikeda, Naoki, Sugimoto, YoshimasaVolume:
57
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/JJAP.57.08PE03
Date:
August, 2018
File:
PDF, 1.90 MB
english, 2018