Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
2018 / 07 Vol. 36; Iss. 4
![](/img/cover-not-exists.png)
Energy dissipation contributed on the machined depth via dynamic plowing lithography of atomic force microscopy
He, Yang, Yan, Yongda, Geng, Yanquan, Fang, ZhuoVolume:
36
Language:
english
Journal:
Journal of Vacuum Science & Technology B
DOI:
10.1116/1.5034168
Date:
July, 2018
File:
PDF, 993 KB
english, 2018