Energy dissipation contributed on the machined depth via...

Energy dissipation contributed on the machined depth via dynamic plowing lithography of atomic force microscopy

He, Yang, Yan, Yongda, Geng, Yanquan, Fang, Zhuo
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Volume:
36
Language:
english
Journal:
Journal of Vacuum Science & Technology B
DOI:
10.1116/1.5034168
Date:
July, 2018
File:
PDF, 993 KB
english, 2018
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