Selective etching of PDMS: Etching technique for...

Applied Surface Science 2018 / 11 Vol. 457

Selective etching of PDMS: Etching technique for application as a positive tone resist

Szilasi, S.Z., Cserháti, C.
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Volume:
457
Language:
english
Journal:
Applied Surface Science
DOI:
10.1016/j.apsusc.2018.06.280
Date:
November, 2018
File:
PDF, 2.42 MB
english, 2018
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