Effects of processing force on performance of...

Effects of processing force on performance of nano-resonators produced by magnetron sputtering deposition

Shaat, Mohamed
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Volume:
104
Language:
english
Journal:
Physica E: Low-dimensional Systems and Nanostructures
DOI:
10.1016/j.physe.2018.07.019
Date:
October, 2018
File:
PDF, 1.04 MB
english, 2018
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