Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
2018 / 07 Vol. 36; Iss. 4
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Growth of well-oriented InN nanodots by magnetron sputtering with varying sputtering temperature
Wang, Hui, Zhao, Yang, Li, Xinzhong, Li, Jingjie, Zhang, Ziming, Wan, Shuai, Gu, Weizhao, Yang, FanVolume:
36
Language:
english
Journal:
Journal of Vacuum Science & Technology B
DOI:
10.1116/1.5028165
Date:
July, 2018
File:
PDF, 2.61 MB
english, 2018