Investigation of position detectors for atomic force microscopes
Vorbringer-Dorozhovets, Nataliya, Mastylo, Rostyslav, Manske, EberhardLanguage:
english
Journal:
Measurement Science and Technology
DOI:
10.1088/1361-6501/aad397
Date:
July, 2018
File:
PDF, 34.91 MB
english, 2018