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Deep etched and released microstructures in Zerodur in a fluorine-based plasma
Weigel, Christoph, Sinzinger, Stefan, Hoffmann, MartinVolume:
198
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2018.07.004
Date:
October, 2018
File:
PDF, 2.47 MB
english, 2018