Design and Optimization of AlN based RF MEMS Switches

IOP Conference Series Materials Science and Engineering 2018 / 05 Vol. 362

Design and Optimization of AlN based RF MEMS Switches

Hasan Ziko, Mehadi, Koel, Ants
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Volume:
362
Language:
english
Journal:
IOP Conference Series: Materials Science and Engineering
DOI:
10.1088/1757-899X/362/1/012002
Date:
May, 2018
File:
PDF, 1.27 MB
english, 2018
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