Mechanical Properties of Polycrystalline Titanium Nitride...

IEEJ Transactions on Sensors and Micromachines 2005 Vol. 125; Iss. 9

Mechanical Properties of Polycrystalline Titanium Nitride Films Measured by XRD Tensile Testing

Namazu, Takahiro, Inoue, Shozo, Takemoto, Hideki, Koterazawa, Keiji
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Volume:
125
Year:
2005
Journal:
IEEJ Transactions on Sensors and Micromachines
DOI:
10.1541/ieejsmas.125.374
File:
PDF, 9.15 MB
2005
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