Substrate and annealing temperature dependent electrical resistivity of sputtered titanium nitride thin films
Kearney, B.T., Jugdersuren, B., Culbertson, J.C., Desario, P.A., Liu, XiaoVolume:
661
Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2018.07.001
Date:
September, 2018
File:
PDF, 1.20 MB
english, 2018