Gas Phase Deposition of Diamond-like Carbon Films by Ion Beam Sputtering Enhanced by Electron Beam Excited Plasma.
MASHIMO, Takahiro, NOGUCHI, Kenji, YOSHIKAWA, Masanori, HIRATA, AtsushiVolume:
66
Year:
2000
Journal:
Journal of the Japan Society for Precision Engineering
DOI:
10.2493/jjspe.66.1621
File:
PDF, 4.04 MB
2000